Page Header

Ergonomic Transducer Design for Endoscopic Optical Coherence Tomography

Bala Maruthi Thanabalan, Samson Mil'shtein


Number of applications for optical MEMS, specifically MEMS with reflecting mirrors increased dramatically in recent years covering areas of optical communication (optical switches), robotics, medical devices, transportation systems, etc. Design of versatile optical transducers with mirrors capable to provide wide range of deflections yet with minimized energy consumption in smaller territory occupied on the semiconductor chip became to be a paramount concern for MEMS designers. Our design describes an optical actuator, where a mirror is installed at a 200µm long lever. On the opposite side of the lever there is a plate of capacitor used to activate lever moves.  The pivoting point could be positioned at any place under the lever to provide needed division of the lever in the ratio needed for specified application. For the Optical Coherence Tomography application discussed in our study the 3:1 ratio is used. Very small applied voltage varying in the range from 0 to 5V moves the mirror with large deflection from 0o to 45o. We discuss briefly the standard micro fabrication steps to be used to make our design of our optical actuator.


Electrostatic actuators, Reflective mirrors, Hardware Design MEMS, MEMS

Full Text:



Seok-Whan Chung, et al., “Design and fabrication of Micromirror supported by electroplated nickel posts,” Department of Electrical Engineering Seoul National University San 56-1 Shinrinz-dong, 1996.

Peter' De Dobbelaere, et al., “Advances in Integrated 2D MEMS based solutions for optical network applications,” OMM Inc., May 2003.

Il-Joo Cho, et al., “A Low-Voltage Two-Axis Electromagnetically Actuated Micromirror With Bulk Silicon Mirror Plates and Torsion Bars,” 34th European Microwave Conference, 2004.

Yun-Ho Jang and Yong-Kweoh Kim, “Design and fabrication of a micromirror using silicon bulk-micromachining for out-of-plane right angle reflection,” School of Electrical Engineering and Computer Science, Seoul National University, 2002.

Can Duan, et al., “A 45°-Tilted 2-Axis Scanning Micromirror Integrated on A Silicon Optical Bench For 3d Endoscopic Optical Imaging,” Dept. of Electrical and Computer Engineering, University of Florida, Gainesville, USA, 2015.

N. Sarkar, et al., “A Large angle, low voltage, small footprint micromirror for eye tracking and near eye display applications,” University of Waterloo, Waterloo, Canada, 2015.

Tuqiang Xie, et al., “Endoscopic optical Coherence tomography with new MEMS mirror,” Dept. of Biomedicine Engineering, State University of New York at Stony Brook, USA, October 2003.

Tai-Ran Tsu, “MEMS and Microsystems”, John Wiley & Sons, Inc., P.285 to P322.

Ankur Jain et al., “A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography “, IEEE Journal of selected topics in Quantum electronics, Vol 10, No.3 May/June 2004.

N Weber et al., “Endoscopic Optical Probes for Linear and rotational scanning”, IEEE 26th International conference on MEMS, 2013.



  • There are currently no refbacks.

Copyright (c) 2017 Bala Maruthi Thanabalan, Samson Mil'shtein

Creative Commons License
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.